期刊
PHYSICA B-CONDENSED MATTER
卷 405, 期 4, 页码 1081-1085出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.physb.2009.11.006
关键词
Zinc oxide; Optical properties; X-ray diffraction; Luminescence
资金
- Institute of Postgraduate Studies (IPS), Universiti Sains Malaysia
ZnO thin films were successfully grown on fused silica substrates by reactive RF sputtering. The ratio of the reactive oxygen (O-2) gas to the sputter argon (At) gas varied from 10% to 90%. The XRD results showed a single diffraction peak of (0 0 2) phase, with the values of FWHM tend to decrease as the oxygen ratio increases. The prepared films showed a good optical transmittance with the decrease of refractive index from 2.2 to 1.9 as the oxygen ratio increases. The PL spectra showed a single UV emission with a broad peak at the visible and infrared regions. The UV peak shifted from 3.25 to 3.17 eV, while the intensity decreases as the oxygen ratio increases. The work discussed the influence of the O-2 ratio on the structural and optical properties of the films. (C) 2009 Elsevier B.V. All rights reserved.
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