4.4 Article Proceedings Paper

Restoring the lattice of Si-based atom probe reconstructions for enhanced information on dopant positioning

期刊

ULTRAMICROSCOPY
卷 159, 期 -, 页码 314-323

出版社

ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2015.05.011

关键词

Atom probe tomography; Crystallography; Lattice rectification; Dopant positioning; Atom probe reconstruction

资金

  1. Australian Microscopy & Microanalysis Research Facility (AMMRF) at The University of Sydney

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The following manuscript presents a novel approach for creating lattice based models of Sb-doped Si directly from atom probe reconstructions for the purposes of improving information on dopant positioning and directly informing quantum mechanics based materials modeling approaches. Sophisticated crystallographic analysis techniques are used to detect latent crystal structure within the atom probe reconstructions with unprecedented accuracy. A distortion correction algorithm is then developed to precisely calibrate the detected crystal structure to the theoretically known diamond cubic lattice. The reconstructed atoms are then positioned on their most likely lattice positions. Simulations are then used to determine the accuracy of such an approach and show that improvements to short-range order measurements are possible for noise levels and detector efficiencies comparable with experimentally collected atom probe data. (C) 2015 Elsevier B.V. All rights reserved.

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