4.7 Article

Probing the role of C+ ion energy, thickness and graded structure on the functional and microstructural characteristics of ultrathin carbon films ( < 2 nm)

期刊

TRIBOLOGY INTERNATIONAL
卷 81, 期 -, 页码 73-88

出版社

ELSEVIER SCI LTD
DOI: 10.1016/j.triboint.2014.08.001

关键词

Wear-resistant; Thin coating; X-ray photoelectron spectroscopy; Corrosion

资金

  1. National Research Foundation, Prime Minister's Office, Singapore under its Competitive Research Programme (CRP Award) [NRF-CRP 4-2008-06]

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We report a comprehensive study on the protective, functional and microstructural properties of filtered cathodic vacuum arc (FCVA) deposited ultrathin carbon overcoats (COCs), which are being considered as potential candidates for future media recording technology such as heat-assisted magnetic recording (HAMR). Specifically, the influence of the C+ ion energy (50-345 eV) and the film thickness (0.5-3.2 nm) on these properties were investigated and supported with Raman and X-ray photoelectron spectroscopy (XPS). Finally, an optimized deposition recipe has been proposed to develop an ultrathin (<= 2.0 nm) yet continuous COC with improved wear and corrosion resistance compared to thicker conventional COCs (similar to 2.7 nm). (C) 2014 Elsevier Ltd. All rights reserved.

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