Properties of W/DLC/W-S-C composite films fabricated by magnetron sputtering

A kind of W/DLC/W-S-C composite film was fabricated by magnetron sputtering method. Effects of WSx content on the structure and the adhesion of the composite films were investigated. In addition, tribological behavior of the composite films was studied in the conditions of the ambient air and N-2 gas atmosphere by ball-on-disk tester. The results indicate that the composite films show dense and amorphous microstructure. The WCx and WSx compounds are found in amorphous diamond like carbon matrix in the top layers of W-S-C. A proper WSx content is beneficial for improving the adhesion of the composite films. In air atmosphere, the composite films with high C content have better wear resistance and the friction coefficients range from 0.15 to 0.25. In N-2 condition, high WSx content is benefit for the wear resistance and the friction coefficients of the composite films range from 0.03 to 0.1.