Synthesis, Structural Characterization, and Thermal Properties of the First Germanium N,N,N′,N′-Tetraalkylguanidinates

The first examples of germanium N,N,N',N'-tetraalkylguanidinates have been prepared, and two of them have been structurally characterized. All of them exihibit high stability and volatility. Their potential as low-temperature precursors for MOCVD of Ge and GexTey films has been explored.