期刊
OPTIK
卷 122, 期 16, 页码 1418-1422出版社
ELSEVIER GMBH, URBAN & FISCHER VERLAG
DOI: 10.1016/j.ijleo.2010.09.019
关键词
Subsurface damage; Quasi-Brewster angle technique; Ellipsometry parameters
类别
资金
- National Natural Science Foundation of China [10825521]
- Shanghai Committee of Science and Technology, China [07DZ22302]
- Shanghai Planned Projects for Postdoctoral Research Funds [10R21416000]
As a surface-sensitive optical method, the quasi-Brewster angle technique is extended to evaluate the subsurface qualities of quartz crystal and fused silica. By measuring the ellipsometry parameters at lambda = 900 nm with variable incidence angle, a fitting process is executed using a proper subsurface nanostructure with an exponential porosity distribution. The fitting results predict the surface and subsurface information which are in good agreement with that of the Zygo interference microscope measurements and etching methods. In addition, the shift characteristics of phase change at the Brewster angle of such crystal and non-crystal material are compared and demonstrated. (C) 2010 Elsevier GmbH. All rights reserved.
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