4.6 Article

All-in-fiber optofluidic sensor fabricated by femtosecond laser assisted chemical etching

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OPTICS LETTERS
卷 39, 期 8, 页码 2358-2361

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OPTICAL SOC AMER
DOI: 10.1364/OL.39.002358

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  1. Department of Energy (DOE)-National Energy Technology Laboratory (NETL) [DE-FE0001127]

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An all-in-fiber prototype optofluidic device was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. Horizontal and vertical microchannels can be flexibly created into an optical fiber to form a fluidic cavity with inlets/outlets. The fluidic cavity also functions as an optical Fabry-Perot cavity in which the filled liquid can be probed. The assembly-free microdevice exhibited a fringe visibility of 20 dB and was demonstrated for measurement of the refractive index of the filling liquids. The proposed all-in-fiber optofluidic micro device is attractive for chemical and biomedical sensing because it is flexible in design, simple to fabricate, mechanically robust, and miniaturized in size. (C) 2014 Optical Society of America

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