4.6 Article

Integrated TiO2 resonators for visible photonics

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OPTICS LETTERS
卷 37, 期 4, 页码 539-541

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OPTICAL SOC AMER
DOI: 10.1364/OL.37.000539

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  1. National Science Foundation (NSF) [ECCS-0901469]
  2. Center for Excitonics, an Energy Frontier Research Center
  3. U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-SC0001088]
  4. NSF GRFP
  5. Directorate For Engineering
  6. Div Of Electrical, Commun & Cyber Sys [0901469] Funding Source: National Science Foundation

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We demonstrate waveguide-coupled titanium dioxide (TiO2) racetrack resonators with loaded quality factors of 2.2 x 10(4) for the visible wavelengths. The structures were fabricated in sputtered TiO2 thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser. (C) 2012 Optical Society of America

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