期刊
OPTICS LETTERS
卷 37, 期 2, 页码 133-135出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.37.000133
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资金
- National Natural Science Foundation of China [60940022, 61108076]
- Open Foundation of the National Laboratory for Infrared Physics
- Chinese Academy of Science [201007]
- Anhui Education Department [KJ2011A009]
- Anhui University
We present a fiber-optic extrinsic Fabry-Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0-50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors. (C) 2012 Optical Society of America
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