期刊
OPTICS LETTERS
卷 37, 期 14, 页码 2781-2783出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.37.002781
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资金
- National Basic Research Program of China (973 Program) [2011CB013000]
- National Natural Science Foundation of China (NSFC) [90923039, 51025521]
This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities. (c) 2012 Optical Society of America
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