期刊
OPTICS LETTERS
卷 33, 期 19, 页码 2281-2283出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.33.002281
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资金
- National Basic Research Program of China [2006CB806000]
- Chinese Academy of Sciences (CAS)
- Shanghai Pujiang Program
- National Outstanding Youth Foundation
We describe the fabrication of a Mach-Zehnder optical modulator in LiNbO3 by femtosecond laser micormachining, which is composed of optical waveguides inscripted by a femtosecond laser and embedded microelectrodes subsequently using femtosecond laser ablation and selective electroless plating. A half-wave voltage close to 19 V is achieved at a wavelength of 632.8 nm with an interaction length of 2.6 mm. This simple and cost-effective technique opens up new opportunities for fabricating integrated electro-optic devices. (C) 2008 Optical Society of America
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