期刊
OPTICS LETTERS
卷 33, 期 15, 页码 1653-1655出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.33.001653
关键词
-
类别
资金
- USAF-BAA Award [FA8650-06-C1025]
- Ohio Third Frontier Project [TECH-05030]
We report the optical characterization of a metal wiregrid micropolarizer array for IR imaging polarimetry. The micropolarizers are designed for operation in the 1.5-5.0 mu m band with a specially designed thin SiO2 layer between the silicon substrate and the wiregrids to improve the performance at the shorter wavelengths. Deep-UV projection lithography is used to fabricate 1.40-nm-deep wiregrids with a 400 nm period. The extinction ratio and the transmission coefficient are measured with a tunable IR laser. A TM transmission coefficient greater than 70% with an extinction ratio greater than 104 is achieved for the midwave-IR region while maintaining an extinction ratio better than 102 for the near-IR region above 1.5 mu m. (c) 2008 Optical Society of America.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据