期刊
OPTICS LETTERS
卷 33, 期 10, 页码 1153-1155出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.33.001153
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资金
- NIBIB NIH HHS [R21EB006098, R21 EB006098] Funding Source: Medline
- NIGMS NIH HHS [T32 GM145304, R01GM072006, R01 GM072006, R01 GM081705, R01 GM081705-02, R01GM081705, R01 GM081705-01] Funding Source: Medline
We demonstrate rapid fabrication of submicrometer-diameter pores in borosilicate glass using femtosecond laser machining and subsequent wet-etch techniques. This approach allows direct and repeatable fabrication of high-quality pores with diameters of 400-800 nm. Such small pores coupled with the desirable electrical and chemical properties of glass enable sensitive resistive-pulse analysis to determine the size and concentration of macromolecules and nanoparticles. Plasma-enhanced chemical vapor deposition allows further reduction of pore diameters to below 300 nm. (C) 2008 Optical Society of America.
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