期刊
OPTICS EXPRESS
卷 26, 期 20, 页码 26057-26064出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.26.026057
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资金
- National Natural Science Foundations of China [61535010, 61605172]
- Public Project of Zhejiang Province [2016C33074]
We propose a highly-sensitive temperature sensor employing a Mach-Zehnder interferometer (MZI) based on silicon-on-insulator (SOI) platform. The waveguide widths in the two MZI arms are tailored to have different temperature sensitivities but nearly the same group refractive indices. A temperature sensor with an enhanced sensitivity of larger than 438pm/degrees C is experimentally demonstrated, which is over seven times larger than that of conventional silicon optical temperature sensor (about 60pm/degrees C for quasi-TM mode). Moreover, the sensor is easy to fabricate, only by a single mask, and no need of any polymer cladding, which makes it more robust, and can be used in lab-on-chip systems as a temperature monitor. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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