4.6 Article

Non-diffraction-length, tunable, Bessel-like beams generation by spatially shaping a femtosecond laser beam for high-aspect-ratio micro-hole drilling

期刊

OPTICS EXPRESS
卷 26, 期 17, 页码 21960-21968

出版社

OPTICAL SOC AMER
DOI: 10.1364/OE.26.021960

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资金

  1. National Key R&D Program of China [2018YFB1107200]
  2. National Natural Science Foundation of China (NSFC) [51675049]
  3. Natural Science Foundation of Beijing Municipality [3172027]
  4. Young Elite Scientists Sponsorship Program [2016QNRC001]
  5. Science Technology Co-ordinating Innovation Project of Shaanxi Province of China [2016KTZDGY-02-02]

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Bessel beams are advantageous in high aspect-ratio microhole drilling because of their immunity to diffraction. However, conventional methods of generating Bessel beams result in poor adjustability of the nondiffraction length. In this study, we theoretically describe and experimentally demonstrate the generation of Bessel-like beams (BLBs) with an adjustable nondiffraction length by using a phase-only spatial light modulator. In this method, nondiffraction lengths varying from 10 to 35 mm can be achieved by changing the designed phase profile (curvature). High-quality, high aspect ratio (560:1) and length-adjustable microholes can be drilled by spatially shaping a femtosecond laser beam. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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