期刊
OPTICS EXPRESS
卷 22, 期 3, 页码 2770-2781出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.22.002770
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资金
- US Department of Energy, Office of Science, Office of Basic Energy sciences [DE-AC-02-98CH10886]
We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms. (C) 2014 Optical Society of America
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