期刊
OPTICS EXPRESS
卷 22, 期 3, 页码 3145-3150出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.22.003145
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- Natural Science and Engineering Research Council of Canada
We design silicon ridge/rib waveguide directional couplers which are simultaneously tolerant to width, height, coupling gap, and etch depth variations. Using wafer-scale measurements of structures fabricated in the IMEC Standard Passives process, we demonstrate the normalized standard deviation in the per-length coupling coefficient (a metric for the splitting ratio variation) of the variation-tolerant directional couplers is up to 4 times smaller than that of strip waveguide designs. The variation-tolerant couplers are also the most broadband and the deviation in the coupling coefficient shows the lowest spectral dependence. (C) 2014 Optical Society of America
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