期刊
OPTICS EXPRESS
卷 22, 期 15, 页码 17644-17656出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.22.017644
关键词
-
类别
资金
- Erlangen Graduate School in Advanced Optical Technologies (SAOT)
- German Research Foundation (DFG)
- Engineering and Physical Sciences Research Council [EP/E055818/1, EP/K034480/1]
- Leverhulme Trust
- EPSRC [EP/E055818/1, EP/K034480/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/E055818/1, EP/K034480/1] Funding Source: researchfish
The spherical aberration generated when focusing from air into another medium limits the depth at which ultrafast laser machining can be accurately maintained. We investigate how the depth range may be extended using aberration correction via a liquid crystal spatial light modulator (SLM), in both single point and parallel multi-point fabrication in fused silica. At a moderate numerical aperture (NA = 0.5), high fidelity fabrication with a significant level of parallelisation is demonstrated at the working distance of the objective lens, corresponding to a depth in the glass of 2.4 mm. With a higher numerical aperture (NA = 0.75) objective lens, single point fabrication is demonstrated to a depth of 1 mm utilising the full NA, and deeper with reduced NA, while maintaining high repeatability. We present a complementary theoretical model that enables prediction of the effectiveness of SLM based correction for different aberration magnitudes. (C) 2014 Optical Society of America
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据