期刊
OPTICS EXPRESS
卷 22, 期 15, 页码 18748-18756出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.22.018748
关键词
-
类别
资金
- Japan Society for the Promotion of Science (JSPS)
- KAKENHI [25889001]
- Ministry of Education, Culture, Sports, Science and Technology (MEXT) of Japan [22109005]
- Grants-in-Aid for Scientific Research [22109005, 25889001, 14J04080] Funding Source: KAKEN
We explore possibilities of waveguide-mode interference lithography (WMIL) technique for high contrast subwavelength structures in the visible region. Selecting an appropriate waveguide-mode, we demonstrate high contrast resist mask patterns for the first time. TM1 mode in the waveguide is shown to be useful for providing a three-dimensional structure whose cross section is checkerboard pattern. Applying our WMIL technique, we demonstrate 1D, 2D and 3D subwavelength resist patterns that are widely used for the fabrication of metamteterials in the visible region. In addition to the resist patterns, we demonstrate a resonance at 1.9 eV for a split tube structure experimentally. (C)2014 Optical Society of America
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据