4.6 Article

Directly modulated buried heterostructure DFB laser on SiO2/Si substrate fabricated by regrowth of InP using bonded active layer

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OPTICS EXPRESS
卷 22, 期 10, 页码 12139-12147

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OPTICAL SOC AMER
DOI: 10.1364/OE.22.012139

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  1. New Energy and Industrial Technology Development Organization (NEDO)

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We describe the growth of InP layer using an ultrathin III-V active layer that is directly bonded to SiO2/Si substrate to fabricate a buried heterostructure (BH) laser. Using a 250-nm-thick bonded active layer, we succeeded in fabricating a BH distributed feedback (DFB) laser on SiO2/Si substrate. The use of a lateral current injection structure is important for forming a p-i-n junction using bonded thin film. The fabricated DFB laser is directly modulated by a 25.8-Gbit/s NRZ signal at 50 degrees C. These results indicate that our fabrication method is a promising way to fabricate highefficiency lasers at a low cost. (C)2014 Optical Society of America

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