期刊
OPTICS EXPRESS
卷 20, 期 9, 页码 -出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.20.010310
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资金
- Sentan from Japan Science and Technology Agency (JST)
- Global COE Center for Excellence for Atomically Controlled Fabrication Technology from the Ministry of Education, Culture, Sports, Science and Technology, Japan
- CREST from JST
- Iketani Science and Technology Foundation
- RIKEN
- [18002009]
Ultraprecise imaging optics, which consists of two sets of elliptical mirrors and hyperbolic mirrors aligned perpendicular to each other (i.e., advanced Kirkpatrick-Baez mirrrors), is developed to realize high-resolution and achromatic full-field hard-X-ray microscopy. Experiments to form a demagnified image (with horizontal and vertical demagnification factors of 385 and 210, respectively) are conducted to evaluate the optical system at an X-ray energy of 11.5 keV at SPring-8. Results show that the imaging system can form a demagnified image with nearly diffraction-limited resolutions of similar to 50 nm in the horizontal and vertical directions. The field of view is also experimentally estimated to be similar to 12 x similar to 14 mu m(2) when used as a magnification imaging system. (C) 2012 Optical Society of America
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