期刊
OPTICS EXPRESS
卷 20, 期 25, 页码 27830-27837出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.20.027830
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资金
- Grant Agency of the Czech Republic [GA102/09/1276, GAP102/11/P820]
- Technology Agency of the Czech Republic [TA02010711, TE01020233]
- European Commission
- Ministry of Education, Youth, and Sports of the Czech Republic [CZ.1.05/2.1.00/01.0017, RVO: 68081731]
We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology. (C)2012 Optical Society of America
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