4.6 Article

Compact x-ray microscope for the water window based on a high brightness laser plasma source

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OPTICS EXPRESS
卷 20, 期 16, 页码 18362-18369

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OPTICAL SOC AMER
DOI: 10.1364/OE.20.018362

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  1. BMBF [13N8913]
  2. BMVBS (WTW) [03WWBE106]

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We present a laser plasma based x-ray microscope for the water window employing a high-average power laser system for plasma generation. At 90 W laser power a brightness of 7.4 x 10(11) photons/(s x sr x mu m(2)) was measured for the nitrogen Ly alpha line emission at 2.478 nm. Using a multilayer condenser mirror with 0.3 % reflectivity 10(6) photons/(mu m(2) x s) were obtained in the object plane. Microscopy performed at a laser power of 60 W resolves 40 nm lines with an exposure time of 60 s. The exposure time can be further reduced to 20 s by the use of new multilayer condenser optics and operating the laser at its full power of 130 W. (C) 2012 Optical Society of America

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