期刊
OPTICS EXPRESS
卷 20, 期 17, 页码 19382-19394出版社
Optica Publishing Group
DOI: 10.1364/OE.20.019382
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资金
- FARE experiment of Istituto Nazionale di Fisica Nucleare (INFN)
- FIRB - Futuro in Ricerca [D11J11000450001]
- Italian Ministry of Instruction, University and Research (MIUR)
An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 10(15) - 10(17) cm(-2)). After implanting in 125 x 125 mu m(2) areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated. (c) 2012 Optical Society of America
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