期刊
OPTICS EXPRESS
卷 19, 期 13, 页码 12356-12364出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.19.012356
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资金
- Defense Advanced Research Projects Agency (DARPA) [HR 0011-10-1-0075]
- Air Force Office of Scientific Research [FA9550-06-01-2003]
We experimentally demonstrate a high resolution integrated spectrometer on silicon on insulator (SOI) substrate using a large-scale array of microdonut resonators. Through top-view imaging and processing, the measured spectral response of the spectrometer shows a linewidth of similar to 0.6 nm with an operating bandwidth of similar to 50 nm. This high resolution and bandwidth is achieved in a compact size using miniaturized microdonut resonators (radius similar to 2 mu m) with a high quality factor, single-mode operation, and a large free spectral range. The microspectrometer is realized using silicon process compatible fabrication and has a great potential as a high-resolution, large dynamic range, light-weight, compact, high-speed, and versatile microspectrometer. (C) 2011 Optical Society of America
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