4.6 Article

Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8

期刊

OPTICS EXPRESS
卷 19, 期 23, 页码 22910-22922

出版社

OPTICAL SOC AMER
DOI: 10.1364/OE.19.022910

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资金

  1. NSF [0748712, 0525429, 0806931]
  2. Direct For Education and Human Resources
  3. Division Of Undergraduate Education [0806931] Funding Source: National Science Foundation
  4. Directorate For Engineering
  5. Div Of Engineering Education and Centers [0851987] Funding Source: National Science Foundation
  6. Division Of Materials Research
  7. Direct For Mathematical & Physical Scien [0748712] Funding Source: National Science Foundation

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A method is reported for fabricating truly three-dimensional micro-photonic structures directly onto the end face of an optical fiber using the cross-linkable resist SU-8. This epoxide-based material is well suited for micro-device fabrication because it is photo-processed as a solid and the cross-linked material is mechanically robust, chemically resistant, and optically transparent. Yet, procedures commonly used to process SU-8, particularly spin-coating, are impractical when the intended fabrication substrate is the end-face of an optical fiber. A melt-reflow process was developed to prepare optical fibers having SU-8 resin deposited at controlled thickness on the fiber end-face. Multi-photon direct laser writing was then used to fabricate various refractive lenses, a compound lens system, and a woodpile photonic crystal within the resin on the end-face of the optical fiber. Data are presented that show how the refractive lenses can be used to alter the output of the optical fiber. This work opens a new path to low-profile integrated photonic devices. (C) 2011 Optical Society of America

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