相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。CMOS compatible cost-efficient fabrication of SOI grating couplers
Jens Bolten et al.
MICROELECTRONIC ENGINEERING (2009)
Modification of silicon waveguide structures using ion implantation induced defects
A. P. Knights et al.
APPLIED SURFACE SCIENCE (2008)
Nanocrystalline silicon solar cells from excimer laser crystallization of amorphous silicon
A. A. D. T. Adikaari et al.
SOLAR ENERGY MATERIALS AND SOLAR CELLS (2008)
International Atomic Energy Agency intercomparison of ion beam analysis software
N. P. Barradas et al.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2007)
Ion-beam-induced amorphization and recrystallization in silicon
L Pelaz et al.
JOURNAL OF APPLIED PHYSICS (2004)
Status and open problems in modeling of as-implanted damage in silicon
G Hobler et al.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2003)
Amorphous silicon waveguides for microphotonics
MJA de Dood et al.
JOURNAL OF APPLIED PHYSICS (2002)
Fabrication and characterization of narrow-band Bragg-reflection filters in silicon-on-insulator ridge waveguides
TE Murphy et al.
JOURNAL OF LIGHTWAVE TECHNOLOGY (2001)