期刊
OPTICS EXPRESS
卷 18, 期 3, 页码 2127-2136出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.18.002127
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- Air Force Office of Scientific Research (AFOSR) [FA9550-06-01-2003]
High quality (Q approximate to 6 x 10(5)) microdisk resonators are demonstrated in a Si3N4 on SiO2 platform at 652-660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial modes. Selective coupling to the first three radial modes with > 20dB suppression of the other radial modes is achieved by controlling the wrap-around waveguide width. Advantages of such pulley-coupled microdisk resonators include single mode operation, ease of fabrication due to larger waveguide-resonator gaps, the possibility of resist reflow during the lithography phase to improve microdisk etched surface quality, and the ability to realize highly over-coupled microdisks suitable for low-loss delay lines and add-drop filters. (C) 2010 Optical Society of America
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