期刊
OPTICS EXPRESS
卷 18, 期 25, 页码 26728-26743出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.18.026728
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资金
- US Department of Energy [DE-FG52-06NA27502]
- Defense Advanced Research Projects Agency (DARPA) (MIT)
- Microsystems Technology Office (MTO) [017535-001]
- ARO [W911NF-09-1-0411]
- agency of the United States Government
- Progetto Roberto Rocca
In this paper, attributes of chalcogenide glass (ChG) based integrated devices are discussed in detail, including origins of optical loss and processing steps used to reduce their contributions to optical component performance. Specifically, efforts to reduce loss and tailor optical characteristics of planar devices utilizing solution-based glass processing and thermal reflow techniques are presented and their results quantified. Post-fabrication trimming techniques based on the intrinsic photosensitivity of the chalcogenide glass are exploited to compensate for fabrication imperfections of ring resonators. Process parameters and implications on enhancement of device fabrication flexibility are presented. (C) 2010 Optical Society of America
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