期刊
OPTICS EXPRESS
卷 18, 期 13, 页码 14159-14164出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.18.014159
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- DFG-Deutsche Forschungsgemeinschaft (German Research Foundation) [OS 111/19-2]
A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nanoscale resolution of the arranged DHM setup. (C) 2010 Optical Society of America
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