期刊
OPTICS EXPRESS
卷 17, 期 6, 页码 4752-4757出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.17.004752
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资金
- Defense Advanced Research Projects Agency (DARPA)
- National Science Foundation [ECS-0335765]
We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 mu m. The waveguide geometry enables low bending loss of approximately 0.007 dB/bend for a 90 degrees bend with a 50 mu m bending radius.(C) 2009 Optical Society of America
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