期刊
OPTICS EXPRESS
卷 17, 期 18, 页码 15726-15735出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.17.015726
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资金
- DARPA [HR0011-08-0002]
- National Science Foundation, EMT [0622246]
- National Science Foundation, MRSEC [DMR-0520565]
- National Science Foundation, CIAN [EEC-0812072]
- Direct For Computer & Info Scie & Enginr
- Division of Computing and Communication Foundations [0622246] Funding Source: National Science Foundation
Optical forces in guided-wave nanostructures have recently been proposed as an effective means of mechanically actuating and tuning optical components. In this work, we study the properties of a photonic crystal optomechanical cavity consisting of a pair of patterned Si3N4 nanobeams. Internal stresses in the stoichiometric Si3N4 thin-film are used to produce inter-beam slot-gaps ranging from 560-40 nm. A general pump-probe measurement scheme is described which determines, self-consistently, the contributions of thermo-mechanical, thermo-optic, and radiation pressure effects. For devices with 40 nm slot-gap, the optical gradient force is measured to be 134 fN per cavity photon for the strongly coupled symmetric cavity supermode, producing a static cavity tuning greater than five times that of either the parasitic thermo-mechanical or thermo-optic effects. (C) 2009 Optical Society of America
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