期刊
OPTICS EXPRESS
卷 17, 期 4, 页码 2623-2630出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.17.002623
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资金
- Australian Research Council
- Federation Fellow programs
- RPO Inc
Nanoimprint lithography is gaining rapid acceptance in fields as diverse as microelectronics and microfluidics due to its simplicity high resolution and low cost. These properties are critically important for the fabrication of photonic devices, where cost is often the major inhibiting deployment factor for high volume applications. We report here on the use of nanoimprint technology to fabricate low loss broadband high index contrast waveguides in a Polysiloxane polymer system for the first time. (C) 2009 Optical Society of America
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