4.6 Article

Fabrication of two-layer integrated phase mask for single-beam and single-exposure fabrication of three-dimensional photonic crystal

期刊

OPTICS EXPRESS
卷 16, 期 12, 页码 9165-9172

出版社

OPTICAL SOC AMER
DOI: 10.1364/OE.16.009165

关键词

-

类别

资金

  1. Directorate For Engineering
  2. Div Of Civil, Mechanical, & Manufact Inn [1115903] Funding Source: National Science Foundation

向作者/读者索取更多资源

In this paper, we report a new design and fabrication of an integrated two-layer phase mask for five-beam holographic fabrication of three-dimensional photonic crystal templates. The phase mask consists of two layers of orthogonally oriented gratings produced in a polymer. The vertical spatial separation between two layers produces a phase shift among diffractive laser beams, which enables the holographic fabrication of interconnected three-dimensional photonic structures. A three-dimensional photonic crystal template was fabricated using the two-layer phase mask and was consistent with simulations based on the five beam interference. The reported method simplifies the fabrication of photonic crystals and is amendable for massive production and chip-scale integration of three-dimensional photonic structures. (C) 2008 Optical Society of American.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据