期刊
OPTICS EXPRESS
卷 16, 期 15, 页码 11289-11293出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.16.011289
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Characterization of the topography of materials by interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface is rough on the length scale of a tenth of the wavelength and more. In this case, THz radiation can provide an interesting alternative. We demonstrate heterodyne profilometry at 600 GHz as a method for the accurate determination of surface topography with an achievable expanded standard uncertainty of 0.5 mu m. (C) 2008 Optical Society of America.
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