期刊
OPTICS COMMUNICATIONS
卷 305, 期 -, 页码 66-70出版社
ELSEVIER
DOI: 10.1016/j.optcom.2013.05.003
关键词
Silicon photonics; Thermo optic; Electro-optical modulator; Heater
类别
资金
- Air Force Office of Scientific Research [FA9550-10-1-0217]
- National Science Foundation [ECS-0335765]
- SEMATECH
We present a heater design for efficient thermo-optic control of silicon photonic devices. The oven-shaped heater is simply realized by using metal contacts/via's in a standard CMOS process. We found both theoretically and experimentally that the micro-oven doubles the heating efficiency over traditional metal strip heaters. Compared to existing high efficiency heater designs, the oven heater is more robust and most importantly it can be easily integrated into electro-optic modulator devices. (C) 2013 Elsevier B.V. All rights reserved.
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