期刊
OPTICS AND LASERS IN ENGINEERING
卷 49, 期 4, 页码 507-513出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2011.01.005
关键词
Ellipsometry; Rotating polarizer analyzer ellipsometer; Optical properties of Au; ZnSe; SiO2
类别
A detailed mathematical derivation and an experimental characterization of one to two ratio rotating polarizer analyzer ellipsometer (RPAE) are presented. The alignment, calibration, and testing of reference samples are also discussed. The optical properties of some known materials obtained by the proposed ellipsometer will be shown and compared to accepted values. Moreover, the constructed ellipsometer will be tested using two ellipsometry standards with different thicknesses. (C) 2011 Elsevier Ltd. All rights reserved.
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