A review of ultrafast laser materials micromachining

A brief review is given regarding ultrafast laser micromachining of materials. Some general experimental observations are first provided to show the characteristics of ultrafast laser micromachining. Apart from empirical research, mathematical models also appear to allow for a further and systematic understanding of these phenomena. A few fundamental ultrafast laser micromachining mechanisms are addressed in an attempt to highlight the physics behind the experimental observations and the mathematical models. It is supposed that a vivid view of ultrafast laser micromachining has been presented by linking experimental observations, mathematical models and the behind physics. (C) 2012 Elsevier Ltd. All rights reserved.