期刊
OPTICAL MATERIALS
卷 36, 期 1, 页码 102-105出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.optmat.2013.04.038
关键词
Femtosecond micromachining; Optofluidics; Black silicon
Femtosecond laser micromachining is a powerful and versatile tool both for the fabrication of photonic and optofluidic devices and for material surface processing. The basics of the technique will be discussed and some examples of applications will be presented. In particular, an optofluidic device for sensing applications, together with silicon surface texturing for applications in the fields of photovoltaic cells and photodetectors are discussed. (C) 2013 Elsevier B.V. All rights reserved.
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