Structural and chemical analysis of pulsed laser deposited MgxZn1-xO hexagonal (x=0.15,0.28) and cubic (x=0.85) thin films

Hexagonal and cubic MgxZn1-xO thin films corresponding to optical band gaps of 3.52eV, 4eV and 6.42eV for x=0.15, 0.28 and 0.85 compositions were grown by pulsed laser deposition technique. The crystalline quality of the films was investigated by X-ray diffraction-rocking curve measurements and indicated a high degree of crystallinity with narrow FWHM's of 0.21 degrees-0.59 degrees. Rutherford back scattering-channeling spectroscopy provides channeling yields of 7-14% indicating the good crystalline quality of the thin films. X-Ray photoelectron spectroscopy measurements clearly indicated different level of oxidation states of Mg and Zn. (C) 2007 Elsevier B.V. All rights reserved.