期刊
OPTICAL ENGINEERING
卷 53, 期 9, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.53.9.092010
关键词
magnetorheological finishing; polishing; laser damage; fused silica
类别
资金
- Conseil Regional d'Aquitaine
- CEA/Marie Curie FP7 Eurotalents postdoctoral fellowship
We investigate the capacity of magnetorheological finishing (MRF) process to remove surface and subsurface defects of fused silica optics. Polished samples with engineered surface and subsurface defects were manufactured and characterized. Uniform material removals were performed with a QED Q22-XE machine using different MRF process parameters in order to remove these defects. We provide evidence that whatever the MRF process parameters are, MRF is able to remove surface and subsurface defects. Moreover, we show that MRF induces a pollution of the glass interface similar to conventional polishing processes. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
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