期刊
出版社
ELSEVIER
DOI: 10.1016/j.nimb.2009.09.057
关键词
Silicon; Defects; Metal precipitates; Nucleation sites; XRF; XAS
The results of the investigations of the interaction between the different impurities in intentionally contaminated block-cast mufti-crystalline silicon by means of synchrotron-based microprobe techniques XBIC (X-ray beam induced current), mu-XRF (X-ray fluorescence microscopy) and mu-XAS (X-ray absorption microspectroscopy) recently implemented at beamlines ID-21 and ID-22 of ESRF, Grenoble, are presented. It was found that Si3N4/SiC particles frequently observed in the upper part of mufti-crystalline Si blocks represent effective sinks for Fe and Cu impurities. The amount of precipitated iron was the same order magnitude both at nitride and carbide particles. The amount of Cu precipitated at the SiC inclusions was significantly larger than that at Si3N4 rods. Chemical state of the copper precipitates was identified as copper-rich silicide Cu(3)si. The anneal at 950 degrees C that is known to enhance oxygen precipitation in silicon was found to accompany with the enhanced formation of nanoscale iron disilicide precipitates both inside the grains and at grain boundaries. (C) 2009 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据