期刊
SURFACE & COATINGS TECHNOLOGY
卷 282, 期 -, 页码 94-102出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2015.10.018
关键词
Bilayer period; TiAlN/MoN nanocomposite multilayer coating; Cathodic arc ion-plating
资金
- National Natural Science Foundation of China [11275141, 11405117]
- Suzhou Scientific Development Project [ZXG201448]
- Basic Research Fund of Central Universities [2012202020217]
TiAlN/MoN multilayers were deposited on Si (100) and cemented carbide substrates using TiAl and Mo targets in a cathodic arc ion plating system with 1-fold rotation. The bilayer thickness (A) of all the layers was controlled via rotational speed of substrate holder within a rage of 21 to 124 nm. The TiAlN/MoN has a multilayered structure in which nano-crystalline TiAlN layers alternate with the nano-crystalline MoN layers. The Ti:Al ratios measured by EDS over all samples were closed to the designed ratio and corresponded to Ti0.70Al0.30N composition. TiAlN/MoN nanoscale multilayer thin films exhibited a TiAlN (200), TiAlN (220), MoN (202) and MoN (200) crystalline orientation. The highest hardness and Young's modulus were obtained with a bilayer period of 25 nm, while wear rate decreased with decreasing bilayer period. On average, nanoindentation measurements combined with atomic force microscopy (AFM) and cross-sectional scanning electron microscopy (SEM) revealed improved mechanical properties of TiAlN/MoN films with decreasing bilayer period were attributed to their densified microstructure with development of fine grains and reduced surface roughness. (C) 2015 Elsevier B.V. All rights reserved.
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