期刊
SURFACE & COATINGS TECHNOLOGY
卷 284, 期 -, 页码 85-89出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2015.06.084
关键词
Plasma diagnostics; Optical emission spectroscopy; Transparent conductive oxides; DC sputtering
资金
- Leading Foreign Research Institute Recruitment Program through the National Research Foundation of Korea - Ministry of Science, the ICT and Future Planning (MSIP) [2011-0031643]
- Global Development Research Center
- Korea Institute for the Advancement of Technology (KIAT) - Ministry of Trade, Industry Energy (MOTIE) [N0000590]
Al doped ZnO films are prepared in dual-confined plasmas (rectangular side-ways and one top-side) in DC magnetron sputtering system without intentional substrate-heating. Present confinement shows improved transparent-conductive properties in Al doped ZnO thin films, when compared to those of deposited by conventional and facing-target confinement. As a function of worldng pressure and power density, plasma diagnostics is carried out at substrate location using optical emission spectroscopy, thermal energy transfer and net current density measurements. The optical, and electrical properties of the synthesis AZO films were studied and correlated to plasma conditions. It is found that high electron temperature, higher plasma density and highly ionization of oxygen play a key role in enhancing the deposition rate and transmittance similar to 90% along with minimizing resistivity in the order of 10(-4) Omega cm. (C) 2015 Elsevier B.V. All rights reserved.
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