期刊
SOLID-STATE ELECTRONICS
卷 114, 期 -, 页码 178-181出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sse.2015.09.010
关键词
Ohmic contact; Germanium-tin; High doping
资金
- Major State Basic Research Development Program of China [2013CB632103]
- National Natural Science Foundation [61177038, 61176013, 61307079]
- Chinese Academy of Sciences
- Japan Society for the Promotion of Science [GJHZ1316]
- Beijing Natural Science Foundation [2142031]
- Beijing Municipal Science and Technology Commission project [Z141100003814002]
In this study, a Ni/Al Ohmic contact on a highly doped n-type GeSn has been investigated. A specific contact resistivity as low as (2.26 +/- 0.11) x 10(-4) Omega cm(2) was obtained with the GeSn sample annealed at a temperature of 450 degrees C for 30 s. The linear Ohmic behavior was attributed to the low resistance of the Ni(GeSn) phase; this behavior was determined using glancing-angle X-ray diffraction, and the quantum tunneling current through the Schottky barrier narrowed because of high doping; this phenomenon was confirmed from the contact resistance characteristics at different temperatures from 45 to 205 K. (C) 2015 Elsevier Ltd. All rights reserved.
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