期刊
NDT & E INTERNATIONAL
卷 62, 期 -, 页码 93-98出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ndteint.2013.11.007
关键词
Genetic algorithm; Inverse problem resolution; Ultrasonic NDE; Porous silicon
This paper presents a method for ultrasonic characterization of porous silicon in which a genetic algorithm based optimization is used to solve the inverse problem. A one-dimensional model describing wave propagation through a water immersed sample is used in order to compute transmission spectra. Then, a water immersion wide bandwidth measurement is performed using an insertion/substitution method and the spectrum of signals transmitted through the sample is calculated using Fast Fourier Transform. In order to obtain parameters such as thickness, longitudinal wave velocity or density, a genetic algorithm based optimization is used. A validation of the method is performed using aluminium plates with two different thicknesses as references: a good agreement on acoustical parameters can be observed, even in the case where ultrasonic signals overlap. Finally, two samples, i.e. a bulk silicon wafer and a porous silicon layer etched on silicon wafer, are evaluated. A good agreement between retrieved values and theoretical ones is observed. Hypothesis to explain slight discrepancies is proposed. (C) 2013 Elsevier Ltd. All rights reserved.
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