4.8 Article

High-resolution electroluminescent imaging of pressure distribution using a piezoelectric nanowire LED array

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NATURE PHOTONICS
卷 7, 期 9, 页码 752-758

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NATURE PUBLISHING GROUP
DOI: 10.1038/NPHOTON.2013.191

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  1. US Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering [DE-FG02-07ER46394]
  2. National Science Foundation
  3. Chinese Academy of Sciences [KJCX2-YW-M13]

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Emulation of the sensation of touch through high-resolution electronic means could become important in future generations of robotics and human-machine interfaces. Here, we demonstrate that a nanowire light-emitting diode-based pressure sensor array can map two-dimensional distributions of strain with an unprecedented spatial resolution of 2.7 mu m, corresponding to a pixel density of 6,350 dpi. Each pixel is composed of a single n-ZnO nanowire/p-GaN light-emitting diode, the emission intensity of which depends on the local strain owing to the piezo-phototronic effect. A pressure map can be created by reading out, in parallel, the electroluminescent signal from all of the pixels with a time resolution of 90 ms. The device may represent a major step towards the digital imaging of mechanical signals by optical means, with potential applications in artificial skin, touchpad technology, personalized signatures, bio-imaging and optical microelectromechanical systems.

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