Compact high-repetition-rate source of coherent 100 eV radiation

Coherently enhancing laser pulses in a passive cavity provides ideal conditions for high-order harmonic generation in a gas, with repetition rates around 100 MHz (refs 1-3). Recently, extreme-ultraviolet radiation with photon energies of up to 30 eV was obtained, which is sufficiently bright for direct frequency-comb spectroscopy at 20 eV (ref. 4). Here, we identify a route to scaling these radiation sources to higher photon energies. We demonstrate that the ionization-limited attainable intracavity peak intensity increases with decreasing pulse duration. By enhancing nonlinearly compressed pulses of an Yb-based laser and coupling out the harmonics through a pierced cavity mirror, we generate spatially coherent 108 eV (11.45 nm) radiation at 78 MHz. Exploiting the full potential of the demonstrated techniques will afford high-photon-flux ultrashort-pulsed extreme-ultraviolet sources for a number of applications in science and technology, including photoelectron spectroscopy, coincidence spectroscopy with femtosecond to attosecond resolution(5,6) and characterization of components and materials for nanolithography(7).