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Femtosecond laser micromachining in transparent materials

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NATURE PHOTONICS
卷 2, 期 4, 页码 219-225

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NATURE PUBLISHING GROUP
DOI: 10.1038/nphoton.2008.47

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Femtosecond laser micromachining can be used either to remove materials or to change a material's properties, and can be applied to both absorptive and transparent substances. Over the past decade, this technique has been used in a broad range of applications, from waveguide fabrication to cell ablation. This review describes the physical mechanisms and the main experimental parameters involved in the femtosecond laser micromachining of transparent materials, and important emerging applications of the technology.

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