期刊
NATURE
卷 485, 期 7397, 页码 221-224出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/nature11002
关键词
-
资金
- Creative Research Initiatives (Research Center of MEMS Space Telescope) of MEST/NRF
- National Research Foundation of Korea [2006-0050686] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Crack formation drives material failure and is often regarded as a process to be avoided(1-3). However, closer examination of cracking phenomena has revealed exquisitely intricate patterns such as spirals(4), oscillating(5,6,7) and branched(7) fracture paths and fractal geometries(8). Here we demonstrate the controlled initiation, propagation and termination of a variety of channelled crack patterns in a film/substrate system(9-11) comprising a silicon nitride thin film deposited on a silicon substrate using low-pressure chemical vapour deposition. Micro-notches etched into the silicon substrate concentrated stress for crack initiation, which occurred spontaneously during deposition of the silicon nitride layer. We reproducibly created three distinct crack morphologies-straight, oscillatory and orderly bifurcated (stitchlike)-through careful selection of processing conditions and parameters. We induced direction changes by changing the system parameters, and we terminated propagation at preformed multi-step crack stops. We believe that our patterning technique presents new opportunities in nanofabrication and offers a starting point for atomic-scale pattern formation(12), which would be difficult even with current state-of-the-art nanofabrication methodologies.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据